Cryogenic Motion / Linear-Z
Cryogenic Linear Stage · Linear-Z Series
Ultra-Low Crosstalk Vertical Motion
Original Multi-Surface Drive: Extreme Load, Minimal XY Crosstalk
1For the Linear-Z Series Translation Stage, the X/Y directional offset during full travel motion does not exceed 6 μm. Straightness is approximately one thousandth of the travel range (after subtracting linear background caused by installation and other factors).
2No special drive cables are needed. All parameters here are measured with 50 Ω cables.
Specifications
Explore Your Options
Linear16-z
垂直运动
Linear25-z
垂直运动
Linear25-z.LR
垂直运动
Linear35-z
垂直运动
➨ 版本定位
标准版本
2 × 10-7 mbar
1.4 K ~ 350 K
✔
✔
✔
✔
.UHV, 超高真空版本
2 × 10-11 mbar
1.4 K ~ 350 K
✔
✔
✔
✔
.ULT, 极低温版本
2 × 10-7 mbar
10 mK ~ 350 K
✔
✔
✔
✔
.UHV.ULT, 超高真空&极低温版本
2 × 10-11 mbar
10 mK ~ 350 K
✔
✔
✔
✔
➨ 基础信息
1外形尺寸
零点位置状态
16 × 16 × 16
( mm × mm × mm )
25 × 25 × 19.6
( mm × mm × mm )
25 × 25 × 29.6
( mm × mm × mm )
35 × 35 × 30
( mm × mm × mm )
2主体材料
标准版本
.UHV 版本
.ULT 版本
.UHV.ULT 版本
纯钛; 12 g
纯钛; 12 g
铍铜; 20 g
铍铜; 20 g
纯钛; 34 g
纯钛; 34 g
铍铜; 58 g
铍铜; 58 g
纯钛; 62 g
纯钛; 62 g
铍铜; 105 g
铍铜; 105 g
纯钛; 118 g
纯钛; 118 g
铍铜; 201 g
铍铜; 201 g
3运动行程
3 mm
6 mm
16 mm
8 mm
4安装空间
满行程运动
16 × 16 × 19
( mm × mm × mm )
25 × 25 × 25.6
( mm × mm × mm )
25 × 25 × 45.6
( mm × mm × mm )
35 × 35 × 38
( mm × mm × mm )
➨ 技术参数
5最大速度
@ 300 K
~ 2 mm/s
~ 2 mm/s
~ 2 mm/s
~ 2 mm/s
6最大负载
250 g
300 g
300 g
300 g
7驱动力
3 N
3 N
3 N
5 N
8最小步伐
~10 nm
~10 nm
~10 nm
~10 nm
9精调分辨率
@ 2 K
sub – nm
sub – nm
sub – nm
sub – nm
10双向重复定位精度
1~2 μm
11位置传感器
种类
量程
分辨率
功率
电阻型位置传感器
3 mm
6 mm
16 mm
8 mm
~ 150 nm
1 mW (极低温可选 1 μW)
➨ 安装 & 使用
12可用孔位
Linear16-z
台面·用户螺纹孔
2 pcs – M1.6 × 2 mm
11.5 mm – 2
Linear25-z
台面·用户螺纹孔
4 pcs – M1.6 × 2 mm
11.5 mm × 11.5 mm
4 pcs – M2 × 2 mm
21.6 mm × 21.6 mm
4 pcs – M2 × 2 mm
11 mm × 20 mm
4 pcs – M2 × 2 mm
20 mm × 11 mm
Linear25-z.LR
台面·用户螺纹孔
4 pcs – M1.6 × 2 mm
11.5 mm × 11.5 mm
4 pcs – M2 × 2 mm
21.6 mm × 21.6 mm
4 pcs – M2 × 2 mm
11 mm × 20 mm
4 pcs – M2 × 2 mm
20 mm × 11 mm
Linear35-z
台面·用户螺纹孔
4 pcs – M2 × 2 mm
21.6 mm × 21.6 mm
4 pcs – M2 × 2 mm
31 mm × 31 mm
4 pcs – M2 × 2 mm
16 mm × 29 mm
4 pcs – M2 × 2 mm
29 mm × 16 mm
Linear16-z
底座·安装孔
2 pcs – Φ 2.1 mm
13.5 mm – 2
Linear25-z
底座·安装孔
4 pcs – Φ 2.1 mm
21.6 mm × 21.6 mm
Linear25-z.LR
底座·安装孔
4 pcs – Φ 2.1 mm
21.6 mm × 21.6 mm
Linear35-z
底座·安装孔
4 pcs – Φ 2.1 mm
31 mm × 31 mm
13线缆 & 接头
驱动线缆 & 接头
传感线缆 & 接头
磷铜四绞线
2mm 排针(1 × 4 pins)
磷铜三绞线
2mm 排针(1 × 3 pins)
14控制器规格
MC-NewtonLT.06 系列
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