Cryogenic Motion / Ultra Series
Scanner.Ultra Series
Sub-Nanometer Cryogenic Closed-Loop Nanopositioning Stage
Featuring an exclusive cryogenic capacitive sensor, enabling sub-nanometer closed-loop control in
extreme conditions for the first time
0.5 nm
Sub-Nanometer Resolution
5 nm
Repeatability
100 μm
Travel Range
50k Sa/s
High-Speed
Data Acquisition
Specifications
Explore Your Options
Scanner25-x.Ultra
Scanner25-z.Ultra
Scanner35-xy.Ultra
Scanner35-z.Ultra
➨ Version
Standard Version
2 × 10-7 mbar
1.4 K ~ 350 K
✔
✔
✔
.UHV, Ultra-High Vacuum Version
2 × 10-11 mbar
1.4 K ~ 350 K
✔
✔
✔
.ULT, Cryogenic Version
2 × 10-7 mbar
10 mK ~ 350 K
✔
✔
✔
.UHV.ULT, Ultra-High Vacuum & Cryogenic Version
2 × 10-11 mbar
10 mK ~ 350 K
✔
✔
✔
➨ Mechanical Specifications
1 Dimensions
Zero Position
25 × 25 × 10.5
( mm × mm × mm )
25 × 25 × 10.5
( mm × mm × mm )
35 × 35 × 14.5
( mm × mm × mm )
35 × 35 × 14.5
( mm × mm × mm )
2 Materials
Standard Version
.UHV
.ULT
.UHV.ULT
Titanium Alloy; 33 g
Titanium Alloy; 33 g
Beryllium Copper; 63 g
Beryllium Copper; 63 g
Titanium Alloy; 30 g
Titanium Alloy; 30 g
Beryllium Copper; 57 g
Beryllium Copper; 57 g
Titanium Alloy; 75 g
Titanium Alloy; 75 g
Beryllium Copper; 145 g
Beryllium Copper; 145 g
Titanium Alloy; 75 g
Titanium Alloy; 75 g
Beryllium Copper; 145 g
Beryllium Copper; 145 g
➨ Motion and Positioning
3 Travel Direction
X
Z
X & Y
Z
4 Travel Range
@ 300 K
@ 4 K
55 μm
30 μm
55 μm
30 μm
100 μm × 100 μm
60 μm × 60 μm
100 μm
60 μm
5 Operating Voltage
@ 300 K
@ 4 K
0 V ~ 75 V
-150 V ~ 150 V
0 V ~ 75 V
-150 V ~ 150 V
0 V ~ 75 V
-150 V ~ 150 V
0 V ~ 75 V
-150 V ~ 150 V
6 Maximum Payload
200 g
200 g
500 g
500 g
7 Load Capacitor
@ 300 K
4 μF
4 μF
8 μF
8 μF
8 Sensor
Type
Capacitive Position Sensor – MultiField C0.2.FLT.Cryo
9 Motion Resolution
(Closed-Loop)
Resolution
Measured Data
0.5 nm
0.5 nm
0.5 nm
0.5 nm
As clearly demonstrated by the controller’s acquired data, the Scanner35-z.Ultra executes closed-loop motion with 1 nm step increments, while achieving an RMS noise level of approximately 0.4 nm.
10 Bidirectional Repeatibility
Typical Value
< 5 nm
< 5 nm
< 5 nm
< 5 nm
Measured Data
With a laser interferometer, the Scanner35-z.Ultra performs reciprocating closed-loop motion with 3 μm steps over a 30 μm range, repeatable positioning deviation within ±5 nm, and RMS < 5 nm
➨ Installation & Operation
11 Mounting Options
Scanner25-x.Ultra
Scanner25-z.Ultra
Scanner35-xy.Ultra
Scanner35-z.Ultra
Scanner25-x.Ultra
Surface·Threaded Hole
4 pcs – M1.6 × 2 mm
11.5 mm × 11.5 mm
3 pcs – M2 × 2 mm
21.6 mm – 3
Scanner25-z.Ultra
Surface·Threaded Hole
4 pcs – M1.6 × 2 mm
11.5 mm × 11.5 mm
4 pcs – M2 × 2 mm
21.6 mm × 21.6 mm
Scanner35-xy.Ultra
Surface·Threaded Hole
4 pcs – M2 × 3.5 mm
21.6 mm × 21.6 mm
4 pcs – M2 × 3.5 mm
31 mm × 31 mm
Scanner35-z.Ultra
Surface·Threaded Hole
4 pcs – M2 × 2.5 mm
21.6 mm × 21.6 mm
4 pcs – M2 × 3 mm
31 mm × 31 mm
Scanner25-x.Ultra
Base·Mounting Hole
2 pcs – Φ 2.1 mm
13.5 mm – 2
Scanner25-z.Ultra
Base·Mounting Hole
2 pcs – Φ 2.1 mm
11 mm – 2
Scanner35-xy.Ultra
Base·Mounting Hole
2 pcs – Φ 2.6 mm
11 mm – 2
Scanner35-z.Ultra
Base·Mounting Hole
2 pcs – Φ 2.6 mm
16 mm – 2
12 Cable & Connector
Actuator Cables & Connectors
Sensor Cables & Connectors
Twisted Phosphor Bronze Wires
2 mm Header Pin (1 × 2 Pin)
Low-Temperature Tri-Axial Cable
Lemo Tri-Axial Connector
13 Controller
MC-ArchimedesLT.Ultra
Product Information
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