Ultra-Precision Motion / Force Series
Force Series
May the Force be with you
The all-new MC series controller delivering ultra-stable nanoscale precision.
Max. Push force
100 N
Peak force output per unit volume
Resolution (Open-loop)
0.02 nm
Ultra-high open-loop resolution
Minimum Incremental Motion (Close-loop)
5 nm
Ultimate control precision under extreme heavy loads
Specification
Explore Your Options
FDU030.Pro
FDU030
FDU100
➨ Versions
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
✔
.NM
Non-magnetic Version
✔
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
✔
➨ General Information
1 Dimensions
Zero Position
FDU30.Pro
58 mm × 25 mm × 25 mm
FDU30
58 mm × 25 mm × 20 mm
FDU100
110 mm × 30 mm × 40 mm
2 Materials
Standard
.HV
.UHV
.NM
Steel ; 130 g
Steel ; 130 g
Steel ; 130 g
Ti，Ceramics ; 75 g
Steel ; 100 g
Steel ; 100 g
Steel ; 100 g
Ti，Ceramics ; 60 g
Steel ; 200 g
Steel ; 200 g
Steel ; 200 g
Ti，Ceramics ; 130 g
3 Travel Range
Default
Optional
15 mm
N/A
20 mm
N/A
70 mm
长度可定
4 Installation Space
Full-Stroke Travel Range
FDU30.Pro
73 mm × 25 mm × 25 mm
FDU30
78 mm × 25 mm × 20 mm
FDU100
180 mm × 30 mm × 40 mm
➨ Specifications
5 Velocity
Default
.HV & .UHV
0.1 mm/s ~ 1 mm/s
0.1 mm/s ~ 0.3 mm/s
0.1 mm/s ~ 1 mm/s
0.1 mm/s ~ 0.3 mm/s
0.1 mm/s ~ 3 mm/s
0.1 mm/s ~ 0.9 mm/s
6 Push Force
30 N
30 N
100 N
7 Holding Force
40 N
40 N
120 N
8 Bidirectional Repeatibility
± 125 nm
N/A
N/A
9 Pitch / Yaw
0.3 mrad
N/A
N/A
10Minimum Incremental Motion
( Open-loop )
( Close-loop )
2 nm
5 nm
2 nm
N/A
2 nm
N/A
11 Open-Loop Operation Minimum Incremental Motion
0.02 nm
0.02 nm
0.02 nm
12 Sensor
Type
Resolution
Other versions
2 nm
N/A
N/A
N/A
N/A
➨ Installation & Operation
13 Mounting Options
FDU030.Pro
FDU030
FDU100
FDU030.Pro
Table · Supported threaded holes
4 pcs – Φ 2.0
11 mm × 6 mm
FDU030
Table · Supported threaded holes
4 pcs – Φ 2.0
11 mm × 6 mm
FDU100
Table · Supported threaded holes
/
FDU030.Pro
Surface · Threaded Hole
4 pcs – M2 × 4
11 mm – 2
6 mm – 2
FDU030
Surface · Threaded Hole
4 pcs – M2 × 4
11 mm – 2
6 mm – 2
FDU100
Surface · Threaded Hole
1 pcs – M4 × 5
FDU030.Pro
Base · Mounting Hole
4 pcs – M3 × 7.5
18 mm × 21 mm
FDU030
Base · Mounting Hole
4 pcs – M3 × 7.5
20 mm × 21 mm
FDU100
Base · Mounting Hole
4 pcs – M4 × 10
25 mm × 25 mm
14 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15 Controller
MC-LuZhishen
Specification
Explore Your Options
LS65x.Force
LS105x.Force
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
➨ General Information
1Dimensions
（ W × L × H ）
Zero Position
LS65x.Force,
65 mm × 65 mm × 20 mm
LS105x.Force,
105 mm × 105 mm × 30 mm
2Materials
Standard
.HV
.UHV
.NM
Steel ; 550 g
Steel ; 550 g
Steel ; 550 g
Ti，Ceramics ; 300 g
Steel ; 2 kg
Steel ; 2 kg
Steel ; 2 kg
Ti，Ceramics ; 1.2 kg
3Travel Range
30 mm
60 mm
4Installation Space
（ W × L × H ）
Full-Stroke Travel Range
LS65x.Force,
65 mm × 95 mm × 20 mm
LS105x.Force,
105 mm × 165 mm × 30 mm
➨ Specifications
5Velocity
Default
.HV & .UHV
0.1 mm/s ~ 1 mm/s
0.3 mm/s
6Push Force
30 N
60 N
7Holding Force
40 N
80 N
8Max. Load
Horizontal mounting
Vertica mounting
5 kg
10 kg
3 kg
6 kg
9Bidirectional Repeatibility
± 125 nm
10Pitch / Yaw
0.3 mrad
0.2 mrad
11Minimum Incremental Motion
( Open-loop )
( Close-loop )
2 nm
5 nm
12Open-Loop Operation Minimum Incremental Motion
0.02 nm
13Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
14Mounting Options
LS65x.Force
Surface · Positioning Pin
4 pcs – Φ 3.0
50 mm × 45 mm
Base · Positioning Pin
4 pcs – Φ 3.0
45 mm × 50 mm
4 pcs – Φ 3.0
45 mm × 50 mm
LS105x.Force
Surface · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
4 pcs – Φ 3.0
45 mm × 50 mm
Base · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
LS65x.Force
Surface · Threaded Hole
4 pcs – M3 × 5.5
55 mm × 55 mm
4 pcs – M3 × 5.5
25 mm × 50 mm
Base · Mounting Hole
4 pcs – Φ 3.3
50 mm × 25 mm
4 pcs – M4 × 6
50 mm × 25 mm
LS105x.Force
Surface · Threaded Hole
4 pcs – M4 × 8
50 mm × 95 mm
4 pcs – M3 × 8
25 mm × 50 mm
4 pcs – M3 × 8
55 mm × 55 mm
Base · Mounting Hole
4 pcs – Φ 5.0
95 mm × 50 mm
4 pcs – M6 × 8
95 mm × 50 mm
15Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
16Controller
MC-LuZhishen
Product Data
Down.List
Product Declarations
2D / 3D file
FDU030.Pro
.STEP
FDU030
.STEP
FDU100
.STEP
LS65x.Force
.STEP
LS105x.Force
.STEP
Product Technical
Force Series Product Manual
Consultation Purchase
Contact us