Ultra-Precision Motion / Free Series
Free6D Series·Multi-Axis Parallel Stage
6 DOF
Utterly Free
The best balance of DOF and precision.
Specification
Explore Your Options
Free6D.3-2.070
Free6D.3-2.150
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
➨ General Information
1 Dimensions
Zero Position
Full-Stroke Travel Range
Φ 70 × 65 mm
Φ 85 × 75 mm
Φ 150 × 90 mm
Φ 155 × 100 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 400 g
Aluminum，Steel ; 400 g
Aluminum，Steel ; 400 g
Ti，Ceramics ; 600 g
Aluminum，Steel ; 1.4 kg
Aluminum，Steel ; 1.4 kg
Aluminum，Steel ; 1.4 kg
Ti，Ceramics ; 2.1 kg
3 Max.Payload ( Vertica mounting )
300 g
1 kg
➨ Specifications
4Aperture
N/A
Φ 40 mm
5 Travel Range
X
Y
Z
θX
θY
θZ
± 5 mm
± 5 mm
± 2.5 mm
± 16 °
± 13 °
± 26 °
± 10 mm
± 10 mm
± 5 mm
± 9 °
± 8 °
± 14 °
6Unidirectional Accuracy
X
Y
Z
θX
θY
θZ
± 0.15 μm
± 0.15 μm
± 0.1 μm
± 8 μrad
± 8 μrad
± 8 μrad
± 0.15 μm
± 0.15 μm
± 0.1 μm
± 5 μrad
± 5 μrad
± 5 μrad
7Minimum Incremental Motion
X
Y
Z
θX
θY
θZ
10 nm
10 nm
10 nm
1 μrad
1 μrad
1 μrad
10 nm
10 nm
10 nm
1 μrad
1 μrad
1 μrad
8 Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
9 Mounting Options
Free6D.3-2.070
Surface · Positioning Pin
3 pcs – Φ 2.0
Φ 28 × 3
Base · Positioning Pin
4 pcs – Φ 2.0
42 mm – 2
58 mm – 2
Free6D.3-2.150
Surface · Positioning Pin
6 pcs – Φ 3.0
Φ 60 × 6
Base · Positioning Pin
8 pcs – Φ 3.0
125 mm × 30 mm
Free6D.3-2.070
Surface · Threaded Hole
3 pcs – M3 × 8
Φ 40 × 3
6 pcs – M2 × 8
20 mm – 2
Base · Mounting Hole
2 pcs – Φ 6.6 × 5.0
50 mm – 2
Free6D.3-2.150
Surface · Threaded Hole
6 pcs – M4 × 4
Φ 80 × 6
12 pcs – M2 × 4
Φ 80 × 6
Φ 60 × 6
Base · Mounting Hole
2 pcs – Φ 6.6 × 9.5
125 mm – 2
10 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
11Controller
MC-Free6D
Dimensions
200 mm × 200 mm × 140 mm
Weight
2.7 kg
Max Power
100 W
Specification
Explore Your Options
Free3D.ZTxTy.070
Free3D.ZTxTy.100
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
➨ General Information
1Dimensions
Zero Position
Full-Stroke Travel Range
Φ 70 × 82 mm
Φ 70 × 90 mm
Φ 100 × 78 mm
Φ 100 × 110 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 800 g
Aluminum，Steel ; 800 g
Aluminum，Steel ; 800 g
Ti，Ceramics ; 460 g
Aluminum，Steel ; 1010 g
Aluminum，Steel ; 1010 g
Aluminum，Steel ; 1010 g
Ti，Ceramics ; 580 g
3 Max.Payload ( Vertica mounting )
5.0 kg
0.5 kg
➨ Specifications
4Aperture
Φ 10 mm
Φ 20 mm
5Travel Range
Z
θX
θY
± 2.5 mm
± 9 °
± 10 °
0~20 mm
± 30 °
± 30 °
6Unidirectional Accuracy
Z
θX
θY
± 0.2 μm
± 8 μrad
± 8 μrad
± 0.2 μm
± 10 μrad
± 10 μrad
7Minimum Incremental Motion
Z
θX
θY
10 nm
1 μrad
1 μrad
10 nm
1 μrad
1 μrad
8Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
9 Mounting Options
Free3D.ZTxTy.070
Surface · Positioning Pin
3 pcs – Φ 2.0
Φ 28 × 3
Base · Positioning Pin
6 pcs – Φ 3.0
20 mm – 2
Free3D.ZTxTy.100
Surface · Positioning Pin
3 pcs – Φ 2.0
Φ 30 × 3
Base · Positioning Pin
3 pcs – Φ 2.0
Φ 60 × 3
Free3D.ZTxTy.070
Surface · Threaded Hole
3 pcs – M3 × 8
Φ 40 × 3
6 pcs – M2 × 8
20 mm – 2
Base · Mounting Hole
3 pcs – Φ 6.6 × 3.0
Φ 50 × 3
Free3D.ZTxTy.100
Surface · Threaded Hole
3 pcs – M3 × 6
Φ 50 × 3
Base · Mounting Hole
3 pcs – Φ 4.5 × 4.5
Φ 75 × 3
10 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
11Controller
MC-Free3D
Dimensions
200 mm × 200 mm × 140 mm
Weight
2.7 kg
Max Power
100 W
Product Data
Down.List
Product Declarations
2D / 3D file
Free6D.3-2.070
.STEP
Free6D.3-2.150
.STEP
Free3D.ZTxTy.070
.STEP
Free3D.ZTxTy.100
.STEP
Product Technical
FreeXD Product Manual
Consultation Purchase
Contact us