Motion-Indus Series

Ultra-Precision Motion / Indus Series

Overview

Specifications

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Specifications

Explore Your Options

Travel Range
50, 100 & 150 mm

Travel Range
200 mm or more

L050.Indus

translational motion

L100.Indus

translational motion

L150.Indus

translational motion

➨ Version

Standard Version

Atmosphere

✔

.HV，High Vacuum Version

Better than 2E-7 mbar

✔

.UHV，Ultra-high Vacuum Version

Better than 2E-11 mbar

✔

.NM, Non-magnetic Version

Non-magnetic

✔

.HV.NM, Non-magnetic, High Vacuum Version

Non-magnetic/High vacuum

✔

.UHV.NM, Non-magnetic, Ultra-high Vacuum Version

Non-magnetic/Ultra-high vacuum

✔

.E，Economical Version

Atmosphere

✔

➨ Mechanical Specifications

1 Dimensions

（ W × L × H ）

Zero Position

90 × 24 × 14
( mm × mm × mm )

180 × 24 × 14
( mm × mm × mm )

250 × 36 × 16.5
( mm × mm × mm )

2 Materials

Standard

.HV

.UHV

.NM

HV.NM

UHV.NM

Aluminum，Steel ; 122 g

Aluminum，Steel ; 142 g

Ti，Ceramics ; 75 g

Aluminum，Steel ; 95 g

Aluminum，Steel ; 240 g

Aluminum，Steel ; 280 g

Ti，Ceramics ; 160 g

Aluminum，Steel ; 200 g

Aluminum，Steel ; 630 g

Aluminum，Steel ; 730 g

Ti，Ceramics ; 390 g

Aluminum，Steel ; 490 g

3 Travel Range

50 mm

100 mm

150 mm

4 Installation Space

Full-Stroke Motion

（W × L × H）

140 × 24 × 14
( mm × mm × mm )

280 × 24 × 14
( mm × mm × mm )

400 × 36 × 16.5
( mm × mm × mm )

➨ Motion and Positioning

5 Velocity

Default

.HV & .UHV

0.1 μm/s ~ 10 mm/s

0.1 μm/s ~ 1 mm/s

6 Push Force

2 N

7 Holding Force

3 N

8 Holding Force

Horizontal mounting

1 kg

2 kg

3 kg

9 Bidirectional Repeatibility

Default

± 150 nm

± 300 nm

10 Pitch / Yaw

0.2 mrad

11 Minimum Incremental Motion (Close-loop)

Default

5 nm

100 nm

12 Sensors

Type

Resolution

Optical Encoder

Default : 2 nm

Optional : 0.5 nm

50 nm

➨ Installation & Operation

13 Mounting Options

L050.Indus

Surface · Positioning Pin

5 pcs – Φ 3.0
15 mm – 5

Base · Mounting Hole

2 pcs – Φ 3.0
63 mm – 2

L100.Indus

Surface · Positioning Pin

11 pcs – Φ 3.0
15 mm – 11

Base · Mounting Hole

2 pcs – Φ 3.42 pcs – Φ 3.4
75 mm – 2125 mm – 2

4 pcs – Φ 3.0
158 mm × 15 mm

L150.Indus

Surface · Positioning Pin

9 pcs – Φ 4.0
29 mm – 9

Base · Mounting Hole

2 pcs – Φ 5.0
150 mm – 2

4 pcs – Φ 4.0
214 mm × 25 mm

L050.Indus

Surface · Threaded Hole

6 pcs – M3 × 5
15 mm – 6

Base · Positioning Pin

2 pcs – Φ 4.3
75 mm – 2

4 pcs – M3 × 4
80 mm × 15 mm

L100.Indus

台面·用户螺纹孔

12 pcs – M3 × 5
15 mm – 12

Base · Positioning Pin

2 pcs – Φ 4.5
100 mm – 2

2 pcs – Φ 3.4
158 mm – 2

L150.Indus

Surface · Threaded Hole

10 pcs – M4 × 7
25 mm – 10

Base · Positioning Pin

4 pcs – Φ 4.5
175 mm – 2

2 pcs – Φ 3.4
214 mm – 2

14 Cable & Connector

Default

.UHV

Shielded Cable， D-Sub15

Kapton-insulated magnet wire，

D-Sub15 (PEEK)

15 Controller

MC-Newton.S

Travel Range
50, 100 & 150 mm

Travel Range
200 mm or more

LS200.Indus

translational motion

➨ Version

Standard Version

Atmosphere

✔

.HV，High Vacuum Version

Better than 2E-7 mbar

✔

.UHV，Ultra-high Vacuum Version

Better than 2E-11 mbar

✔

.NM, Non-magnetic Version

Non-magnetic

✔

.HV.NM, Non-magnetic, High Vacuum Version

Non-magnetic/High vacuum

✔

.UHV.NM, Non-magnetic, Ultra-high Vacuum Version

Non-magnetic/Ultra-high vacuum

✔

.E，Economical Version

Atmosphere

✔

➨ Mechanical Specifications

1 Dimension

（ W × L × H ）

82 × 295 × 20
( mm × mm × mm )

2 Materials

Standard

.HV

.UHV

.NM

Aluminum，Steel ; 1 kg

Ti，Ceramics ; /

Aluminum，Steel ; 1 kg

3 Travel Range

200 mm

➨ Motion and Positioning

4 Velocity

Default

.HV & .UHV

0.1 μm/s ~ 10 mm/s

0.1 μm/s ~ 1 mm/s

5Drive Force

3 N

6Holding Force

5 N

7 Max.Payload

Horizontal load

Vertical load

2 kg

100 g

8Bidirectional Repeatibility

Default

± 100 nm

± 300 nm

9 Pitch / Yaw

0.3 mrad

10 Minimum Incremental Motion(Close-loop)

Default

5 nm

100 nm

11 Sensor

Type

Resolution

Optical Sensor

Defaul : 2 nm

Selectable : 0.5 nm

50 nm

➨ Installation & Operation

12 Mounting Options

LS200.Indus

Surface · Positioning Pin

4 pcs – Φ 3.0
45 mm × 50 mm

4 pcs – Φ 3.0
50 mm × 45 mm

Base · Mounting Hole

4 pcs – Φ 3.0
50 mm × 45 mm

4 pcs – Φ 3.0
240 mm × 45 mm

LS200.Indus

Surface · Threaded Hole

4 pcs – M3 × 5
50 mm × 25 mm

4 pcs – M3 × 5
25 mm × 50 mm

Base · Positioning Pin

4 pcs – Φ 3.4
50 mm × 25 mm

4 pcs – Φ 3.4
240 mm × 25 mm

13 Cable & Connector

Default

.UHV

Shielded Cable， D-Sub15

Kapton-insulated magnet wire，

D-Sub15 (PEEK)

14 Controller

MC-Newton.S

Product Data

Down.List

Product Declarations

2D / 3D file

L050.Indus

.STEP

2025 / 05 / 13

Download

L100.Indus

.STEP

2024 / 06 / 12

Download

L150.Indus

.STEP

2024 / 11 / 06

Download

LS200.Indus

.STEP

2024 / 06 / 04

Download

Product Technical

Indus Series Product Manual

.pdf

室温压电运动系列手册

.pdf

2025 / 12 / 26

下载

Consultation Purchase

info@multifields.com
Building 2, Nonferrous Metals New Materials Science Park, Huairou Science City, Huairou District, Beijing