Ultra-Precision Motion / Indus Series
Specification
Explore Your Options
L050.Indus
translational motion
L100.Indus
translational motion
L150.Indus
translational motion
➨ Versions
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
✔
.NM
Non-magnetic Version
✔
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
✔
.E，Economical Version
Atmosphere
✔
✔
✔
➨ General Information
1Dimensions
（ W × L × H ）
Zero Position
90 × 24 × 14
( mm × mm × mm )
180 × 24 × 14
( mm × mm × mm )
250 × 36 × 16.5
( mm × mm × mm )
2Materials
Standard
.HV
.UHV
.NM
.E
Aluminum，Steel ; 174 g
Aluminum，Steel ; 174 g
Aluminum，Steel ; 174 g
Ti，Ceramics ; 160 g
Aluminum，Steel ; 174 g
Aluminum，Steel ; 388 g
Aluminum，Steel ; 388 g
Aluminum，Steel ; 388 g
Ti，Ceramics ; 270 g
Aluminum，Steel ; 388 g
Aluminum，Steel ; 840 g
Aluminum，Steel ; 840 g
Aluminum，Steel ; 840 g
Ti，Ceramics ; 640 g
Aluminum，Steel ; 840 g
3Travel Range
50 mm
100 mm
150 mm
4Installation Space
Full-Stroke Travel Range
（W × L × H）
140 × 24 × 14
( mm × mm × mm )
280 × 24 × 14
( mm × mm × mm )
400 × 36 × 16.5
( mm × mm × mm )
➨ Specifications
5Velocity
Default
.HV & .UHV
0.1 μm/s ~ 10 mm/s
0.1 μm/s ~ 1 mm/s
6Push Force
2 N
7Holding Force
3 N
8Holding Force
Horizontal mounting
1 kg
2 kg
3 kg
9Bidirectional Repeatibility
Default
.E
± 150 nm
± 300 nm
10Pitch / Yaw
0.2 mrad
11Minimum Incremental Motion (Close-loop)
Default
.E
5 nm
100 nm
12Sensors
Type
Resolution
Optical Encoder
Default : 2 nm
Optional : 0.5 nm
.E
50 nm
➨ Installation & Operation
13Mounting Options
L050.Indus
Surface · Positioning Pin
5 pcs – Φ 3.0
15 mm – 5
Base · Mounting Hole
2 pcs – Φ 3.0
63 mm – 2
L100.Indus
Surface · Positioning Pin
11 pcs – Φ 3.0
15 mm – 11
Base · Mounting Hole
2 pcs – Φ 3.42 pcs – Φ 3.4
75 mm – 2125 mm – 2
4 pcs – Φ 3.0
158 mm × 15 mm
L150.Indus
Surface · Positioning Pin
9 pcs – Φ 4.0
29 mm – 9
Base · Mounting Hole
2 pcs – Φ 5.0
150 mm – 2
4 pcs – Φ 4.0
214 mm × 25 mm
L050.Indus
Surface · Threaded Hole
6 pcs – M3 × 5
15 mm – 6
Base · Positioning Pin
2 pcs – Φ 4.3
75 mm – 2
4 pcs – M3 × 4
80 mm × 15 mm
L100.Indus
台面·用户螺纹孔
12 pcs – M3 × 5
15 mm – 12
Base · Positioning Pin
2 pcs – Φ 4.5
100 mm – 2
2 pcs – Φ 3.4
158 mm – 2
L150.Indus
Surface · Threaded Hole
10 pcs – M4 × 7
25 mm – 10
Base · Positioning Pin
4 pcs – Φ 4.5
175 mm – 2
2 pcs – Φ 3.4
214 mm – 2
14Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15Controller
LS200.Indus
translational motion
➨ Versions
Standard Version
Atmosphere
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
.NM
Non-magnetic Version
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
.E，Economical Version
Atmosphere
✔
➨ General Information
1Dimensions
（ W × L × H ）
82 × 295 × 20
( mm × mm × mm )
2Materials
Standard
.HV
.UHV
.NM
.E
Aluminum，Steel ; 1 kg
Aluminum，Steel ; 1 kg
Aluminum，Steel ; 1 kg
Ti，Ceramics ; /
Aluminum，Steel ; 1 kg
3Travel Range
200 mm
➨ Specifications
4Velocity
Default
.HV & .UHV
0.1 μm/s ~ 10 mm/s
0.1 μm/s ~ 1 mm/s
5Drive Force
3 N
6Holding Force
5 N
7Max.Payload
Horizontal load
Vertical load
2 kg
100 g
8Bidirectional Repeatibility
Default
.E
± 100 nm
± 300 nm
9Pitch / Yaw
0.3 mrad
10Minimum Incremental Motion(Close-loop)
Default
.E
5 nm
100 nm
11Sensor
Type
Resolution
Optical Sensor
Defaul : 2 nm
Selectable : 0.5 nm
.E
50 nm
➨ Installation & Operation
11Mounting Options
LS200.Indus
Surface · Positioning Pin
4 pcs – Φ 3.0
45 mm × 50 mm
4 pcs – Φ 3.0
50 mm × 45 mm
Base · Mounting Hole
4 pcs – Φ 3.0
50 mm × 45 mm
4 pcs – Φ 3.0
240 mm × 45 mm
LS200.Indus
Surface · Threaded Hole
4 pcs – M3 × 5
50 mm × 25 mm
4 pcs – M3 × 5
25 mm × 50 mm
Base · Positioning Pin
4 pcs – Φ 3.4
50 mm × 25 mm
4 pcs – Φ 3.4
240 mm × 25 mm
14Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15Controller
Product Data
Down.List
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