Ultra-Precision Motion / mini Series
mini series
Small in Size,Mighty in Craft
Closed-Loop Motion Control, Nanometer-Scale MIM, Over 1 million Full-Stroke Cycles
Lifetime
1M Cycles
The standard product is finalized for at least 1 million full-stroke cycles
Max. load
300 g
Peak force output per unit volume
Specification
Explore Your Options
X20.mini
X11.mini
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
➨ General Information
1Dimensions
（ W × L × H ）
Zero Position
Full-Stroke Travel Range
23.2 mm × 20 mm × 12 mm
33.2 mm × 20 mm × 12 mm
11 mm × 11 mm × 6.5 mm
17 mm × 11 mm × 6.5 mm
2Materials
Standard
.HV
.UHV
.NM
Steel ; 30 g
Steel ; 30 g
Steel ; 30 g
Ti，Ceramics ; 30 g
Steel ; 10 g
Steel ; 10 g
Steel ; 10 g
Ti，Ceramics ; 10 g
3Travel Range
10 mm
6 mm
➨ Specifications
4Velocity
Default
.HV & .UHV
10 mm/s
1 mm/s
10 mm/s
1 mm/s
5Push Force
1.5 N
0.3 N
6Holding Force
3 N
0.5 N
7Max.Payload
Horizontal mounting
Vertical mounting
300 g
100 g
50 g
N/A
8Minimum Incremental Motion(Close-loop)
5 nm
N/A
9Sensor
Resolution
Type
2 nm
N/A
Optical Sensor
N/A
➨ Installation & Operation
10Mounting Options
X20.mini
Surface · Positioning Pin
2 pcs – Φ 1.5
7.5 mm – 2
Base · Mounting Hole
2 pcs – Φ 1.5
10 mm – 2
X11.mini
Surface · Positioning Pin
2 pcs – Φ 1.0
8.5 mm – 2
Base · Mounting Hole
/
X20.mini
Surface · Threaded Hole
2 pcs – M2 × 3.5
15 mm – 2
Base · Positioning Pin
4 pcs – M1.6 × 3
15 mm × 15 mm
X11.mini
Surface · Threaded Hole
4 pcs – M1.4 × 2.0
9 mm × 9 mm
2 pcs – M1.0 × 2.0
8.5 mm – 2
Base · Positioning Pin
2 pcs – Φ 1.0
8.5 mm – 2
2 pcs – Φ 1.2
8.5 mm – 2
11Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
12Controller
Consultation Purchase
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