Specification
Explore Your Options
SD15.X
SD30.X
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
➨ General Information
1Direction & Travel Range ( Close-Loop )
15 μm
30 μm
2 Dimensions
（W × L × H）
62 mm × 40 mm × 13.5 mm
80 mm × 40 mm × 13.5 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 180 g
Aluminum，Steel ; 180 g
Aluminum，Steel ; 180 g
Aluminum，Ti ; 160 g
Aluminum，Steel ; 250 g
Aluminum，Steel ; 250 g
Aluminum，Steel ; 250 g
Aluminum，Ti ; 220 g
➨ Installation Space
4 Installation Space
0.03%
0.03%
5Unidirectional Accuracy
2 nm
4 nm
6Minimum Incremental Motion
Open-Loop
Close-Loop
0.2 nm
0.1 nm
0.5 nm
0.2 nm
7Stiffness
28 N/μm
18 N/μm
8Resonant frequency 1
Unloaded
300 g Loaded
3.3 kHz
1 kHz
2.2 kHz
0.625 kHz
9 Max.Payload
300 g
300 g
10 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
11 Mounting Options
SD15.X
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
26 mm × 18 mm
SD15.X
SD15.X
Surface · Mounting Hole
4 pcs – Φ 3.5
52 mm × 30 mm
SD15.X
SD15.X
Surface · Positioning Pin
2 pcs – Φ 2.8
25 mm – 2
SD15.X
SD30.X
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
44 mm × 18 mm
2 pcs – M2.5 × 5.0
18 mm – 2
SD30.X
SD30.X
Surface · Mounting Hole
4 pcs – Φ 2.8
50 mm × 30 mm
SD30.X
SD30.X
Surface · Positioning Pin
4 pcs – Φ 2.8
25 mm – 2
SD30.X
12 Cable & Connector
Default
.UHV
Shielded Cabl , D-Sub 7W2
Shielded Cable , SMA
13 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
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