Specification
Explore Your Options
S100.X
S200.X
S300.X
➨ Versions
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
✔
.NM,
Non-magnetic Version
✔
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
✔
➨ General Information
1Direction & Travel Range ( Close-Loop )
100 μm
200 μm
300 μm
2 Dimensions
（W × L × H）
55 mm × 55 mm × 17 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Ti ; 200 g
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Ti ; 200 g
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Steel ; 220 g
Aluminum，Ti ; 200 g
➨ Specifications
4Linearity error
0.02%
0.02%
0.02%
5Unidirectional Accuracy
5 nm
5 nm
5 nm
6Minimum Incremental Motion
Open-Loop
Close-Loop
0.5 nm
0.2 nm
0.6 nm
0.3 nm
0.9 nm
0.5 nm
7Stiffness
1 N/μm
0.65 N/μm
0.25 N/μm
8Resonant frequency 1
Unloaded
0.5 kg Loaded
750 Hz
200 Hz
590 Hz
162 Hz
310 Hz
100 Hz
9 Max.Payload
500 g
500 g
500 g
10 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
11 Mounting Options
S100/200/300.X
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
25 mm × 50 mm
4 pcs – M2.5 × 5.0
50 mm × 25 mm
4 pcs – M2.5 × 5.0
50 mm + 50 mm
S100/200/300.X
Base · Mounting Hole
4 pcs – Φ 2.8
48 mm × 48 mm
12 Cable & Connector
Default
.UHV
Shielded Cable , D-Sub 7W2
Shielded Cable , SMA
13 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
S500.X
➨ Versions
Standard Version
Atmosphere
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
.NM,
Non-magnetic Version
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
➨ General Information
1Direction & Travel Range ( Close-Loop )
500 μm
2 Dimensions
（W × L × H）
70 mm × 70 mm × 17 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 250 g
Aluminum，Steel ; 250 g
Aluminum，Steel ; 250 g
Aluminum，Ti ; 230 g
➨ Installation Space
4 Installation Space
0.02%
5Unidirectional Accuracy
6 nm
6Minimum Incremental Motion
Open-Loop
Close-Loop
1.5 nm
0.7 nm
7Stiffness
0.16 N/μm
8Resonant frequency 1
Unloaded
300 g Loaded
210 Hz
80 Hz
9 Max.Payload
500 g
10 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
11 Mounting Options
S500.X
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
40 mm × 63 mm
4 pcs – M2.5 × 5.0
63 mm × 40 mm
4 pcs – M2.5 × 5.0
63 mm + 63 mm
S500.X
Base · Mounting Hole
4 pcs – Φ 2.8
63 mm × 63 mm
11 Mounting Options
Default
.UHV
Shielded Cabl , D-Sub 7W2
Shielded Cabl , SMA
13 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
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