Specification
Explore Your Options
S100.XY
S200.XY
S300.XY
➨ Versions
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
✔
.NM,
Non-magnetic Version
✔
✔
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
✔
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
✔
✔
➨ General Information
1Direction & Travel Range ( Close-Loop )
100 μm
200 μm
300 μm
2 Dimensions
（W × L × H）
55 mm × 55 mm × 28 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Ti ; 410 g
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Ti ; 410 g
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Steel ; 450 g
Aluminum，Ti ; 410 g
➨ Specifications
4Linearity error
0.02%
0.02%
0.02%
5Unidirectional Accuracy
5 nm
5 nm
5 nm
6Minimum Incremental Motion
Open-Loop
Close-Loop
0.5 nm
0.2 nm
0.6 nm
0.3 nm
0.9 nm
0.5 nm
7Stiffness
0.7 N/μm
0.5 N/μm
0.2 N/μm
8Resonant frequency 1
X
Y
570 Hz
530 Hz
480 Hz
400 Hz
300 Hz
260 Hz
9 Resonant frequency 1
(0.5 kg Loaded)
X
Y
130 Hz
120 Hz
130 Hz
115 Hz
85 Hz
80 Hz
10 Max.Payload
500 g
500 g
500 g
11Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
12 Mounting Options
S100/200/300.XY
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
25 mm × 50 mm
4 pcs – M2.5 × 5.0
50 mm × 25 mm
4 pcs – M2.5 × 5.0
50 mm + 50 mm
S100/200/300.XY
Base · Mounting Hole
4 pcs – Φ 2.8
48 mm × 48 mm
13 Cable & Connector
Default
.UHV
Shielded Cable , D-Sub 7W2
Shielded Cable , SMA
14 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
S500.XY
➨ Versions
Standard Version
Atmosphere
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
.NM,
Non-magnetic Version
✔
.HV.NM
Non-magnetic + High vacuum Version
✔
.UHV.NM
Non-magnetic + Ultra-high vacuum Version
✔
➨ General Information
1Direction & Travel Range ( Close-Loop )
500 μm
2 Dimensions
（W × L × H）
70 mm × 70 mm × 28 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 500 g
Aluminum，Steel ; 500 g
Aluminum，Steel ; 500 g
Aluminum，Ti ; 460 g
➨ Installation Space
4 Installation Space
0.02%
5Unidirectional Accuracy
6 nm
6Minimum Incremental Motion
Open-Loop
Close-Loop
1.5 nm
0.7 nm
7Stiffness
0.13 N/μm
8Resonant frequency 1
X
Y
190 Hz
150 Hz
9 Resonant frequency 1
(0.5 kg Loaded)
X
Y
68 Hz
66 Hz
10 Max.Payload
500 g
11 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
12 Mounting Options
S500.XY
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
40 mm × 63 mm
4 pcs – M2.5 × 5.0
63 mm × 40 mm
4 pcs – M2.5 × 5.0
63 mm + 63 mm
S500.XY
Base · Mounting Hole
4 pcs – Φ 2.8
63 mm × 63 mm
13 Cable & Connector
Default
.UHV
Shielded Cabl , D-Sub 7W2
Shielded Cabl , SMA
14 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
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