Motion / Speed Series
Speed Series
Unstoppable Speed
A faster servo cycle and higher algorithm efficiency ensure high precision at high speeds
Max. Linear Speed:
200 mm/s
High-speed performance
even at the nanoscale.
Max. Rotation Speed:
720 °/s
A high-speed closed-
loop rotary motor
Max. load:
2 kg
Fast and capable of
carrying heavy loads
* Supports multiple communication interfaces; Supports analog signal motion control; Non-magnetic versions and special ultra-high-vacuum versions available
Specifications
Explore Your Options
LS50x.Speed
LS65x.Speed
LS105x.Speed
➨ Version
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
➨ Mechanical Specifications
1 Dimensions
Zero Position
（ W × L × H ）
LS50x.Speed,
50 mm × 50 mm × 14 mm
LS65x.Speed,
65 mm × 65 mm × 15 mm
LS105x.Speed,
105 mm × 105 mm × 20 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 120 g
Ti,Steel ; 150 g
Ti，Steel ; 150 g
Ti，Ceramics ; 130 g
Aluminum，Steel ; 200g
Ti,Steel ; 270 g
Ti，Steel ; 270 g
Ti，Ceramics ; 240 g
Aluminum，Steel ; 660 g
Ti,Steel ; 960 g
Ti，Steel ; 960 g
Ti，Ceramics ; 910 g
3 Travel Range
22 mm
30 mm
60 mm
4 Installation Space
Full-Stroke Motion
（ W × L × H ）
LS50x.Speed,
50 mm × 74 mm × 14 mm
LS65x.Speed,
65 mm × 95 mm × 15 mm
LS105x.Speed,
105 mm × 165 mm × 20 mm
➨ Motion and Positioning
5 Velocity
Default
.HV & .UHV
5 mm/s ~ 200 mm/s
5 mm/s ~ 20 mm/s
6 Push Force
1.5 N
3 N
4 N
7 Holding Force
3 N
4 N
5 N
8 Max.Payload
Horizontal mounting
Vertica mounting
2 kg
100 g
3 kg
150 g
5 kg
N/A
9 Bidirectional Repeatibility
± 250 nm
± 250 nm
± 250 nm
10 Pitch / Yaw
0.3 mrad
0.3 mrad
0.2 mrad
11 Minimum Incremental Motion
Open-loop
50 nm
50 nm
50 nm
12 Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
13 Mounting Options
LS50x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
Base · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
LS65x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 50 mm
Base · Positioning Pin
4 pcs – Φ 2.5
50 mm × 40 mm
LS105x.Speed
Surface · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
Base · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
LS50x.Speed
Surface · Threaded Hole
4 pcs – M2.5 × 3.5
20 mm × 20 mm
4 pcs – M2.5 × 3.5
30 mm × 45 mm
4 pcs – M2.5 × 3.5
45 mm × 45 mm
Base · Mounting Hole
4 pcs – Φ 2.9
45 mm × 30 mm
LS65x.Speed
Surface · Threaded Hole
4 pcs – M3 × 4
25 mm × 50 mm
4 pcs – M3 × 4
55 mm × 55 mm
Base · Mounting Hole
4 pcs – Φ 3.2
50 mm × 25 mm
LS105x.Speed
Surface · Threaded Hole
4 pcs – M3 × 5
25 mm × 50 mm
4 pcs – M3 × 5
55 mm × 55 mm
4 pcs – M4 × 5
50 mm × 95 mm
4 pcs – M4 × 5
95 mm × 95 mm
Base · Mounting Hole
4 pcs – Φ 4.3
95 mm × 50 mm
14. Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15 Controller
MC-Doppler
Specifications
Explore Your Options
RS65.Speed
RS105.Speed
➨ Version
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
➨ Mechanical Specifications
1 Dimensions
Zero Position
（ W × L × H ）
RS65.Speed,
65 mm × 65 mm × 25 mm
RS105.Speed,
105 mm × 135 mm × 25 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum ; 330 g
Ti ; 360 g
Ti ; 360 g
Aluminum ; 330 g
Aluminum ; 800 g
Ti ; 1 kg
Ti ; 1 kg
Aluminum ; 800 g
3 Travel Range
360 °
➨ Motion and Positioning
4 Velocity
Default
.HV & .UHV
60 °/s ~ 720 °/s
60 °/s
1.3 °/s ~ 360 °/s
36 °/s
5 Max.Payload
2 kg
5 kg
6Rating Torque
0.5 N·m
0.4 N·m
7Max Torque
0.8 N·m
0.6 N·m
8Maintain Torque
0.8 N·m
0.6 N·m
9Minimum Incremental Motion
15 μrad
0.75 μrad
10 Sensors
Type
Resolution
Optical Encoder
1 μrad
Optical Encoder
1 μrad
➨ Installation & Operation
11 Mounting Options
RS65.Speed
Surface · Threaded Hole
8 pcs – M3 ×4
50 mm × 50 mm
Base · Mounting Hole
4 pcs – Φ 3.4
50 mm × 55 mm
RS105.Speed
Surface · Threaded Hole
4 pcs – Φ 4.0
75 mm × 75 mm
Base · Mounting Hole
4 pcs – Φ 4.3
95 mm × 50 mm
12 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
13 Controller
Consultation Purchase
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