Nanometrology/ Capacitive Distance Sensor
Nanometrology · Distance Sensor
Capacitive Distance Sensor
Sub-nanometer Spatial Resolution / Multi-channel High-speed Parallel Data Acquisition
Compatible with Extreme Operational Environments Including Ultra-high Vacuum (UHV) and Completely Non-magnetic Conditions
50 kSa/s
Data Acquisition & Transmission Bandwidth
UHV
Ultra-high Vacuum Compatible
≤ ± 0.01 % FSO
High Linearity
0.2 ~ 3 mm
Wide Measuring Range
Sub-nm
Ultra-high Resolution
Sensor
Multiple Measuring Ranges & Diverse Installation Forms
Three types of sensor are provided, namely Flat, Cylindrical and Cylindrical with thread,
covering range 0.2 mm, 0.5 mm, 1 mm, 2 mm & 3 mm.
Options for high vacuum(.HV), ultra-high vacuum(.UHV) & completely non-magnetic material(.NM) are available.
Measuring Range ➠
0.2 mm
0.5 mm
1 mm
2 mm
3 mm
Flat sensors . FLT
Cylindrical sensors . CYL
Cylindrical sensors with thread . SCR
* Capable of accommodating special operating environments, including ultra-high vacuum (.UHV), completely non-magnetic (.NM), and cryogenic (.Cryo) requirements.
Technical Parameters
Choose the Better Fit
Sensor·Basic Information
1
Sensor Type
Flat . FLT
Cylindrical . CYL
Cylindrical with thread . SCR
2
Mounting Method
Screw
M1.6/ M2/ M2.5
Clamping
Φ 8 mm
Thread
M 10 × 1
3
Cable Connection
Integrated
Plug
Plug
4
Shell Material
Ti
5
Measuring Range1
0.2 mm
0.5 mm
1 mm
2 mm
3 mm
6
Linearity 2
± 0.02 um
± 0.05 um
± 0.10 um
± 0.20 um
± 0.30 um
7
Sensitivity 3
50 V/mm
20 V/mm
10 V/mm
5 V/mm
3.33 V/mm
8
Resolution 4
Dynamic 5
Static 6
4 nm
0.2 nm
10 nm
0.5 nm
20 nm
1 nm
40 nm
2 nm
60 nm
3 nm
Monitor·Technical Data
9
Bandwidth
10 kHz / 1 kHz / 20 Hz
10
Linearity
± 0.01 % FSO 7
11
Resolution
Dynamic @ 10 kHz
0.002 % FSO
Static @ 20 Hz
0.0001 % FSO
12
Sensitivity Deviation
± 0.01 %
13
Repeatability
0.0003 % FSO
14
Temperature Stability
10 ppm/℃
15
Output
Software-side
Hardware-side
Software FaradayRead
The default software directly displays distance and supports advanced functions such as real-time spectrum analysis and mathematical formula processing.
Secondary Development Kit
Labview, C & C#
Analog Output Interface
BNC connector: 0～10V (default); ± 5V, ± 10V (available)
Digital Output Interface
Ethernet , EtherCAT , SPI (available)
16
Data Rate
Analog
Max. 10 kHz @ -3 dB
Digital
50 kSa/s x 8 channels
17
No. of Channels
Max. 8
18
Synchronous Operation
Feasible synchronization between multiple monitors
1.Measuring Range, Maximum measurement distance of the sensor probe.
2.Linearity, an industry-standard parameter, reflects the absolute accuracy of sensor measurements under factory calibration conditions.
3.Sensitivity, an industry-standard parameter, refers to the ratio of the sensor system’s output change to the input change – specifically, the magnitude of the output voltage corresponding to a unit displacement.
4.Resolution, an industry-standard parameter, refers to the minimum displacement increment measurable under a specific bandwidth, given as the RMS noise value.
5.Dynamic (resolution), refers to the resolution at a 10 kHz bandwidth.
6.Static (resolution), refers to the resolution at a 20 Hz bandwidth.
7.FSO, an abbreviation for Full-Scale Output；
Position Monitor I
Advanced Faraday0N (N channels)
The Faraday series compact position-sensing monitor supports expansion to up to 8 measurement channels and is compatible with the full range of sensor probes
►Module I · Signal Processing Board
0.3 – 3×
Customizable Probe Range Extension
Zero Adjustment
Any position within the measurement range can be set as the zero point
10 kHz / 1 kHz / 20 Hz
Flexible, Adjustable Bandwidth
0~10 V / ±5 V / ±10 V
Configurable Analog Output Range
►Module II · Multi-Channel Chassis Frame, Box03 & 08
220 V AC
Power Supply Module
EtherNET & EtherCAT
Digital Module
Expandable to up to 8 channels
Chassis Frame
Multi-Unit Synchronization Supported
Excitation Module
Displacement Monitor II
Compact Faraday.ECO
The Faraday series compact position-sensing monitor is a single-channel all-in-one unit, compatible with the full range of sensor probes
Standalone Unit
Independent Single-Channel Operation
3 W
Low Power Consumption
A * B * H
Compact, Small Form Factor
RS232, RS485, USB
Serial Digital Interface
Features · High-speed Data Acquisition
50 kSa/s Data Acquisition for High-speed Recording of Impact Vibrations
Data originates from the planar vibrations induced by a single-pulse impact, without any blind spots throughout the entire motion-monitoring process.
Features · Software
Real-time FFT Analysis
Multi-channel Position Data Display
Sampling Rate Adjustable
FFT Analysis
Real-time Spectrum Analysis
Velocity & Acceleration Analysis
Real-time Differential Signal
Data indexing
Automatic Peak/Valley Detection
Software Zeroing
Configure Digital Zero Point Anytime
Out-of-range Warning
Configurable Warning Conditions
Features · High- speed Real-time Communication
20 µs / point Real-time Communication For Ultra-precision Motion Closed-loop Control
In a motion system achieving speed up to 200 mm/s with nanometer-level precision, the C1-FLT sensor paired with the Faraday.03 monitor provides real-time position information for closed-loop control.
The Faraday.03 performs position updates every 20 ms, offering critical support for PID dynamic control.
The closed-loop system completes five motion phases – startup, acceleration, uniform motion, deceleration, and stop – in 5.3 ms, achieving a smooth 1-nm step without overshoot.