Ultra-Precision Motion / Carrier Microscope Series
Carrier Microscope Series
“Microscope Solution Beyond Optical Resolution”
Nanometer-scale resolution, highly compact form factor, large clear aperture, and seamless compatibility with long travel range
Specifications
Explore Your Options
Carrier.L7550s.XY
Carrier.L1010s.XY
➨ Version
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
✔
.HV.NM, Non-magnetic, High Vacuum Version
Non-magnetic/High vacuum
✔
✔
✔
.UHV.NM, Non-magnetic, Ultra-high Vacuum Version
Non-magnetic/Ultra-high vacuum
✔
✔
✔
.E，Economical Version
Atmosphere
✔
✔
✔
➨ Mechanical Specifications
1 Dimension
Zero Position
Full-Stroke Travel Range
140 mm × 125 mm × 28 mm
215 mm × 175 mm × 28 mm
185 mm × 185 mm × 28 mm
285 mm × 285 mm × 28 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 1.5 kg
Aluminum，Steel ; 1.5 kg
Aluminum，Steel ; 1.5 kg
Aluminum，Steel ; 1.5 kg
Aluminum，Steel，Ceramics ; 2 kg
Aluminum，Steel，Ceramics ; 2 kg
Aluminum，Steel，Ceramics ; 2 kg
Aluminum，Steel，Ceramics ; 2 kg
3Travel Range
75 mm × 50 mm
100 mm × 100 mm
➨ Motion and Positioning
4 Velocity
Default
.HV & .UHV
0.1 μm/s ~ 10 mm/s
0.1 μm/s ~ 1 mm/s
5 Push Force
2 N
6Holding Force
4 N
7 Max.Payload
Horizontal Mounting
4 kg
8 Minimum Incremental Motion ( Close-loop )
10 nm
9 Pitch / Yaw
0.3 mrad
10 Sensor
Resolution
Type
2 nm
Optical Encoder
➨ Installation & Operation
11 Mounting Options
Carrier.L7550s.XY
Surface · Positioning Pin
/
Base · Positioning Pin
/
Carrier.L1010s.XY
Surface · Positioning Pin
/
Base · Positioning Pin
4 pcs – Φ 4.0
125 mm × 125 mm
Carrier.L1010s.XY
Surface · Threaded Hole
4 pcs – M3 × 6.5
25 mm × 100 mm
4 pcs – M3 × 6.5
50 mm × 100 mm
4 pcs – M6 × 6.5
75 mm × 100 mm
Base · Mounting Hole
4 pcs – Φ 6.6
125 mm × 75 mm
4 pcs – M6 × 10
125 mm × 50 mm
Carrier.L1010s.XY
Surface · Threaded Hole
4 pcs – M6 × 6.5
25 mm × 150 mm
4 pcs – M6 × 6.5
75 mm × 150 mm
4 pcs – M6 × 6.5
125 mm × 150 mm
Base · Mounting Hole
6 pcs – Φ 6.6
150 mm × 100 mm
4 pcs – M6 × 10
150 mm × 50 mm
12 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton-insulated magnet wire，
D-Sub15 (PEEK)
13 Controller
Specifications
Explore Your Options
Carrier.L7550.XY
Carrier.L1010.XY
➨ Version
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
✔
➨ Mechanical Specifications
1Dimension
Zero Position
Full-Stroke Travel Range
250 mm × 200 mm × 25 mm
325 mm × 250 mm × 25 mm
250 mm × 250 mm × 30 mm
350 mm × 350 mm × 30 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 2.1 kg
Aluminum，Steel ; 2.1 kg
Aluminum，Steel ; 2.1 kg
Aluminum，Steel ; 1.9 kg
Aluminum，Steel，Ceramics ; 3.5 kg
Aluminum，Steel，Ceramics ; 3.5 kg
Aluminum，Steel，Ceramics ; 3.5 kg
Aluminum，Steel，Ceramics ; 3.3 kg
3Travel Range
75 mm × 50 mm
100 mm × 100 mm
➨ Motion and Positioning
4 Velocity
Default
.HV & .UHV
0.1 μm/s ~ 10 mm/s
0.1 μm/s ~ 1 mm/s
5 Push Force
2 N
6Holding Force
4 N
7 Max.Payload
Horizontal Mounting
4 kg
8 Minimum Incremental Motion ( Close-loop )
5 nm
9 Pitch / Yaw
0.3 mrad
10 Sensor
Resolution
Type
2 nm
Optical Encoder
➨ Installation & Operation
11 Mounting Options
Carrier.L7550.XY
Surface · Positioning Pin
4 pcs – M2 × 3
127 mm × 106 mm
4 pcs – M2.5 × 3
156 mm × 76 mm
4 pcs – M4 × 6
166 mm × 134 mm
16 pcs – M6 × 16
200 mm × 125 mm
Carrier.L1010.XY
Surface · Positioning Pin
4 pcs – M4 × 7.5
166 mm × 134 mm
10 pcs – M6 × 7.5
150 mm × 100 mm
28 pcs – M6 × 7.5
200 mm × 150 mm
Carrier.L7550.XY
Base · Mounting Hole
4 pcs – M6 × 8
150 mm × 50 mm
4 pcs – Φ 6.6
175 mm × 50 mm
6 pcs – Φ 6.6
150 mm × 100 mm
6 pcs – Φ 6.6
150 mm × 100 mm
Carrier.L1010.XY
Base · Mounting Hole
8 pcs – M6 × 12.5
200 mm × 150 mm
6 pcs – Φ 6.6
200 mm × 100 mm
12 Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton-insulated magnet wire，
D-Sub15 (PEEK)
13 Controller
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