Ultra-Precision Motion / S、SD & SH Series

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Piezo Nanopositioning Stages · S Series

Balanced Excellence in a Compact Package

Maximize Every Millimeter, Perfect Balance of Travel, Load, Frequency, and Precision

S Series·Balanced Excellence

Linear Stage

S Series·Balanced Excellence

XY Linear Stage

X

S100/200/300/500.X

XY

S100/200/300/500.XY

  • 55 mm × 55 mm × 17 mm，70 mm × 70 mm × 17 mm, Motion in X direction
  • Travel range options: 100/200/300/500 um
  • Capacitive sensor closed-loop control with 0.5 nm resolution
  • Repeatability better than 5 nm, fully non-magnetic, UHV versions available

Details >>

  • 55 mm × 55 mm × 28 mm，70 mm × 70 mm × 28 mm, Motion in XY direction
  • Travel range options: 100/200/300/500 um
  • Capacitive sensor closed-loop control with 0.5 nm resolution
  • Repeatability better than 5 nm, fully non-magnetic, UHV versions available

Details >>

S Series·Balanced Excellence

Vertical Stage

Z

S100/200/300.Z

  • 55 mm × 55 mm × 23 mm, Motion in Z direction
  • Travel range options: 100/200/300 um
  • Capacitive sensor closed-loop control with 0.5 nm resolution
  • Repeatability better than 5 nm, fully non-magnetic, UHV versions available

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S Series·Balanced Excellence

XYZ Linear Stage

S Series·Balanced Excellence

XYZ Linear Stage

XYZ

S100/200/300.XYZ

XYZ

S100.XYZ.P

  • 55 mm × 55 mm × 42 mm, Motion in XYZ direction
  • Travel range options: 100/200/300 um
  • Capacitive sensor closed-loop control with 1 nm resolution
  • Repeatability better than 5 nm, fully non-magnetic, UHV versions available

Details >>

  • 40 mm × 40 mm × 40 mm, Motion in XYZ direction
  • 100 um travel range
  • Capacitive sensor closed-loop control with 1 nm resolution
  • Repeatability better than 6 nm, fully non-magnetic, UHV versions available

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Piezo Nanopositioning Stages · SD Series

High-Dynamic Performance with Exceptional Closed-Loop Precision

Unmatched Dynamics: 3.3 kHz Resonance & 0.1 nm Pinpoint Precision

SD Series·Ultra-High Dynamics

Linear Stage

X

SD15/30.X

  • 3.3 kHz resonance frequency (under zero load)
  • Capacitive sensor closed-loop control with 0.1 nm resolution
  • Repeatability better than 4 nm, fully non-magnetic, UHV versions available

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Piezo Nanopositioning Stages · SH Series

Heavy Loads,Zero Compromise

Bear 10+ kg with Unmatched 0.3 nm Precision

SH Series·Heavy Loads

XYZ Linear Stage

XYZ

SH30.XYZ

  • 10 kg Load Capacity
  • Capacitive sensor closed-loop control with 0.3 nm resolution
  • Repeatability better than 4 nm, fully non-magnetic, UHV versions available

Details >>