Specifications
Explore Your Options
SH150.X
X motion
➨ Version
Standard Version
Atmosphere
✔
.HV, High Vacuum Version
Better than 2E-7 mbar
✔
.UHV, Ultra-High Vacuum Version
Better than 2E-11 mbar
✔
.NM, Non-magnetic Version
Non-magnetic
✔
.HV.NM, Non-magnetic, High Vacuum Version
Non-magnetic, High vacuum
✔
.UHV.NM, Non-magnetic, Ultra-high Vacuum Version
Non-magnetic, Ultra-high vacuum
✔
➨ Mechanical Specifications
1 Travel Range
150 μm
2 Dimensions
90 mm × 90 mm × 36.5 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum, Steel；1 kg
Aluminum, Steel；1 kg
Aluminum, Steel；1 kg
Aluminum, Titanium；0.9 kg
➨ Motion and Positioning
4 Linearity Error
0.02 %
5 Repeatibility
5 nm
6 Resolution
Closed-loop
Open-loop
0.5 nm
0.2 nm
7 Stiffness
5 N/μm
8 Resonance Frequency 1
Zero Load
0.5 kg Load
1300 Hz
200 Hz
9 Load Capacity
8 kg
10 Sensor
Capacitive Displacement Sensor ·
Faraday Series
➨ Installation & Operation
11 Mounting Options
SH150.X
Surface·Threaded Hole
4 pcs – M4 × 6.5
32 mm × 30 mm
SH150.X
SH150.X
Surface·Positioning Pin
4 pcs – Φ 3.0
30 mm
SH150.X
Surface·Mounting Hole
4 pcs – Φ 5.5
78 mm × 78 mm
Base·Positioning Pin
4 pcs – Φ 3.0
78 mm
12 Cable & Connector
Standard
.UHV
Shielded Cable, D-Sub 7W2
Kapton-insulated magnet wire, SMA
13 Controller
MC-Archimedes.N Series
1.Resonant frequency variation: ±20%；
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