Specifications
Explore Your Options
SH30.XYZ
XYZ motion
➨ Version
Standard Version
Atmosphere
✔
.HV, High Vacuum Version
Better than 2E-7 mbar
✔
.UHV, Ultra-High Vacuum Version
Better than 2E-11 mbar
✔
.NM, Non-magnetic Version
Non-magnetic
✔
.HV.NM, Non-magnetic, High Vacuum Version
Non-magnetic, High vacuum
✔
.UHV.NM, Non-magnetic, Ultra-high Vacuum Version
Non-magnetic, Ultra-high vacuum
✔
➨ Mechanical Specifications
1 Travel Range
30 × 30 × 15 μm
2 Dimensions
160 mm × 160 mm × 34.5 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum, Steel；4.5 kg
Aluminum, Steel；4.5 kg
Aluminum, Steel；4.5 kg
Aluminum, Titanium；4.2 kg
➨ Motion and Positioning
4 Linearity Error
0.03%
5 Repeatibility
4 nm
6 Resolution
Closed-loop
Open-loop
0.3 nm
0.2 nm
7 Stiffness
25 N/μm
8 Resonance Frequency 1
X
Y
Z
760 Hz
760 Hz
830 Hz
9 Load Capacity
X
Y
Z
220 Hz
220 Hz
340 Hz
10Max.Load
10 kg
11 Sensor
Capacitive Displacement Sensor ·
Faraday Series
➨ Installation & Operation
12 Mounting Options
SH30.XYZ
Surface·Threaded Hole
4 pcs – M4.0 × 5.0
54 mm × 140 mm
4 pcs – M4.0 × 5.0
140 mm × 54 mm
2 pcs – M4.0 × 5.0
50 mm – 2
2 pcs – M4.0 × 5.0
50 mm – 2
SH30.XYZ
Surface·Mounting Hole
4 pcs – Φ 4.5
140 mm × 140 mm
13 Cable & Connector
Standard
.UHV
屏蔽线缆, D-Sub 7W2
屏蔽线缆, SMA
14 Controller
MC-Archimedes.N Series
1.Resonant frequency variation: ±20%；
Consultation Purchase
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