Motion / Speed Series
Specifications
Explore Your Options
LS50x.Speed
LS65x.Speed
LS105x.Speed
➨ Version
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
➨ Mechanical Specifications
1 Dimensions
Zero Position
（ W × L × H ）
LS50x.Speed,
50 mm × 50 mm × 14 mm
LS65x.Speed,
65 mm × 65 mm × 15 mm
LS105x.Speed,
105 mm × 105 mm × 20 mm
2 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 120 g
Ti,Steel ; 150 g
Ti，Steel ; 150 g
Ti，Ceramics ; 130 g
Aluminum，Steel ; 200g
Ti,Steel ; 270 g
Ti，Steel ; 270 g
Ti，Ceramics ; 240 g
Aluminum，Steel ; 660 g
Ti,Steel ; 960 g
Ti，Steel ; 960 g
Ti，Ceramics ; 910 g
3 Travel Range
22 mm
30 mm
60 mm
4 Installation Space
Full-Stroke Motion
（ W × L × H ）
LS50x.Speed,
50 mm × 74 mm × 14 mm
LS65x.Speed,
65 mm × 95 mm × 15 mm
LS105x.Speed,
105 mm × 165 mm × 20 mm
➨ Motion and Positioning
5 Velocity
Default
.HV & .UHV
5 mm/s ~ 200 mm/s
5 mm/s ~ 20 mm/s
6 Push Force
1.5 N
3 N
4 N
7 Holding Force
3 N
4 N
5 N
8 Max.Payload
Horizontal mounting
Vertica mounting
2 kg
100 g
3 kg
150 g
5 kg
N/A
9 Bidirectional Repeatibility
± 250 nm
± 250 nm
± 250 nm
10 Pitch / Yaw
0.3 mrad
0.3 mrad
0.2 mrad
11 Minimum Incremental Motion
Open-loop
50 nm
50 nm
50 nm
12 Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
13 Mounting Options
LS50x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
Base · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
LS65x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 50 mm
Base · Positioning Pin
4 pcs – Φ 2.5
50 mm × 40 mm
LS105x.Speed
Surface · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
Base · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
LS50x.Speed
Surface · Threaded Hole
4 pcs – M2.5 × 3.5
20 mm × 20 mm
4 pcs – M2.5 × 3.5
30 mm × 45 mm
4 pcs – M2.5 × 3.5
45 mm × 45 mm
Base · Mounting Hole
4 pcs – Φ 2.9
45 mm × 30 mm
LS65x.Speed
Surface · Threaded Hole
4 pcs – M3 × 4
25 mm × 50 mm
4 pcs – M3 × 4
55 mm × 55 mm
Base · Mounting Hole
4 pcs – Φ 3.2
50 mm × 25 mm
LS105x.Speed
Surface · Threaded Hole
4 pcs – M3 × 5
25 mm × 50 mm
4 pcs – M3 × 5
55 mm × 55 mm
4 pcs – M4 × 5
50 mm × 95 mm
4 pcs – M4 × 5
95 mm × 95 mm
Base · Mounting Hole
4 pcs – Φ 4.3
95 mm × 50 mm
14. Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15 Controller
MC-Doppler
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