Motion / Speed Series
Specification
Explore Your Options
LS50x.Speed
LS65x.Speed
LS105x.Speed
➨ Versions
Standard Version
Atmosphere
✔
✔
.HV，High Vacuum Version
Down to 2E-7 mbar
✔
✔
.UHV，Ultra-high Vacuum Version
Down to 2E-11 mbar
✔
✔
.NM
Non-magnetic Version
✔
✔
➨ General Information
1Dimensions
Zero Position
（ W × L × H ）
LS50x.Speed,
50 mm × 50 mm × 14 mm
LS65x.Speed,
65 mm × 65 mm × 15 mm
LS105x.Speed,
105 mm × 105 mm × 20 mm
2Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 120 g
Ti,Steel ; 150 g
Ti，Steel ; 150 g
Ti，Ceramics ; 130 g
Aluminum，Steel ; 200g
Ti,Steel ; 270 g
Ti，Steel ; 270 g
Ti，Ceramics ; 240 g
Aluminum，Steel ; 660 g
Ti,Steel ; 960 g
Ti，Steel ; 960 g
Ti，Ceramics ; 910 g
3Travel Range
22 mm
30 mm
60 mm
4Installation Space
Full-Stroke Travel Range
（ W × L × H ）
LS50x.Speed,
50 mm × 74 mm × 14 mm
LS65x.Speed,
65 mm × 95 mm × 15 mm
LS105x.Speed,
105 mm × 165 mm × 20 mm
➨ Specifications
5Velocity
Default
.HV & .UHV
5 mm/s ~ 200 mm/s
5 mm/s ~ 20 mm/s
6Push Force
1.5 N
3 N
4 N
7Holding Force
3 N
4 N
5 N
8Max.Payload
Horizontal mounting
Vertica mounting
2 kg
100 g
3 kg
150 g
5 kg
N/A
9Bidirectional Repeatibility
± 250 nm
± 250 nm
± 250 nm
10Pitch / Yaw
0.3 mrad
0.3 mrad
0.2 mrad
11Minimum Incremental Motion
Open-loop
50 nm
50 nm
50 nm
12Sensors
Type
Resolution
Optical Encoder
2 nm
➨ Installation & Operation
13Mounting Options
LS50x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
Base · Positioning Pin
4 pcs – Φ 2.5
40 mm × 40 mm
LS65x.Speed
Surface · Positioning Pin
4 pcs – Φ 2.5
40 mm × 50 mm
Base · Positioning Pin
4 pcs – Φ 2.5
50 mm × 40 mm
LS105x.Speed
Surface · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
Base · Positioning Pin
4 pcs – Φ 4.0
75 mm × 75 mm
LS50x.Speed
Surface · Threaded Hole
4 pcs – M2.5 × 3.5
20 mm × 20 mm
4 pcs – M2.5 × 3.5
30 mm × 45 mm
4 pcs – M2.5 × 3.5
45 mm × 45 mm
Base · Mounting Hole
4 pcs – Φ 2.9
45 mm × 30 mm
LS65x.Speed
Surface · Threaded Hole
4 pcs – M3 × 4
25 mm × 50 mm
4 pcs – M3 × 4
55 mm × 55 mm
Base · Mounting Hole
4 pcs – Φ 3.2
50 mm × 25 mm
LS105x.Speed
Surface · Threaded Hole
4 pcs – M3 × 5
25 mm × 50 mm
4 pcs – M3 × 5
55 mm × 55 mm
4 pcs – M4 × 5
50 mm × 95 mm
4 pcs – M4 × 5
95 mm × 95 mm
Base · Mounting Hole
4 pcs – Φ 4.3
95 mm × 50 mm
14Cable & Connector
Default
.UHV
Shielded Cable， D-Sub15
Kapton Enamelled Wire，
D-Sub15 (PEEK)
15Controller
MC-Doppler
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