Specifications
Explore Your Options
S100.XYZ
S200.XYZ
S300.XYZ
➨ Version
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
✔
.HV.NM, Non-magnetic, High Vacuum Version
Non-magnetic/High vacuum
✔
✔
✔
.UHV.NM, Non-magnetic, Ultra-high Vacuum Version
Non-magnetic/Ultra-high vacuum
✔
✔
✔
➨ Mechanical Specifications
1 Travel Range
100 μm
200 μm
300 μm
2 Dimensions
（W × L × H）
55 mm × 55 mm × 42 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Ti ; 600 g
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Ti ; 600 g
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Steel ; 650 g
Aluminum，Ti ; 600 g
➨ Motion and Positioning
4Linearity error
0.02%
0.02%
0.02%
5 Repeatibility
5 nm
5 nm
5 nm
6 Resolution
Open-Loop
Close-Loop
0.5 nm
0.2 nm
0.6 nm
0.3 nm
0.9 nm
0.5 nm
7Stiffness
0.6 N/μm
0.5 N/μm
0.2 N/μm
8Resonant frequency 1
X
Y
Z
490 Hz
480 Hz
350 Hz
410 Hz
380 Hz
320 Hz
310 Hz
250 Hz
230 Hz
9Resonant frequency 1
(0.5 kg )
X
Y
Z
110 Hz
115 Hz
170 Hz
100 Hz
105 Hz
155 Hz
75 Hz
80 Hz
110 Hz
10 Load Capacity
500 g
500 g
500 g
11 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
12 Mounting Options
S100.XYZ
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
26 mm × 45 mm
4 pcs – M2.5 × 5.0
45 mm × 26 mm
4 pcs – M2.5 × 5.0
45 mm + 45 mm
S100.XYZ
S200/300.XYZ
Surface · Threaded Hole
4 pcs – M2.5 × 5.0
25 mm × 50 mm
4 pcs – M2.5 × 5.0
50 mm × 25 mm
4 pcs – M2.5 × 5.0
50 mm + 50 mm
S200/300.XYZ
Base · Mounting Hole
4 pcs – Φ 2.8
45 mm × 45 mm
Base · Mounting Hole
4 pcs – Φ 2.8
48 mm × 48 mm
13 Cable & Connector
Default
.UHV
Shielded Cable , D-Sub 7W2
Shielded Cable , SMA
14 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
Consultation Purchase
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