Specifications
Explore Your Options
S100.XYZ.P
➨ Version
Standard Version
Atmosphere
✔
✔
✔
.HV，High Vacuum Version
Better than 2E-7 mbar
✔
✔
✔
.UHV，Ultra-high Vacuum Version
Better than 2E-11 mbar
✔
✔
✔
.NM, Non-magnetic Version
Non-magnetic
✔
✔
✔
.HV.NM, Non-magnetic, High Vacuum Version
Non-magnetic/High vacuum
✔
✔
✔
.UHV.NM, Non-magnetic, Ultra-high Vacuum Version
Non-magnetic/Ultra-high vacuum
✔
✔
✔
➨ Mechanical Specifications
1 Travel Range
100 μm
2 Dimensions
（W × L × H）
40 mm × 40 mm × 40 mm
3 Materials
Standard
.HV
.UHV
.NM
Aluminum，Steel ; 200 g
Aluminum，Steel ; 200 g
Aluminum，Steel ; 200 g
Aluminum，Ti ; 190 g
➨ Motion and Positioning
4Linearity error
0.02%
5 Repeatibility
6 nm
6 Resolution
Open-Loop
Close-Loop
1 nm
0.5 nm
7Stiffness
0.6 N/μm
8Resonant frequency 1
X
Y
Z
750 Hz
750 Hz
750 Hz
9Resonant frequency 1
(0.2 kg )
X
Y
Z
230 Hz
230 Hz
230 Hz
10 Load Capacity
200 g
11 Sensors
Capacitive Sensors
Farady Series
➨ Installation & Operation
12 Mounting Options
S100.XYZ.P
Surface · Threaded Hole
4 pcs – M2.0 × 3.0
15 mm + 15 mm
S100.XYZ.P
Base · Mounting Hole
2 pcs – Φ 2.8
16 mm – 2
13 Cable & Connector
Default
.UHV
屏蔽线缆, D-Sub 7W2
屏蔽线缆, SMA
14 Controller
MC-Archimedes.N
1. Resonance frequency fluctuation range ±20%;
Consultation Purchase
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