Ultra-Precision Motion / Piezo Nanopositioning Stages · Carrier.S Series

Overview

Specifications

Download

Contact Us

Open-Aperture Nanopositioning Stages · Carrier.S Series

Z – axis Solution

Parallel Kinematic Design and Capacitive Closed-Loop Control Ensures Perfect Z-Axis Orthogonality and Straightness

Carrier.S · Open-Aperture Nanopositioning Stages

Vertical Stage

Z- Axis Motion

Carrier.S · Open-Aperture Nanopositioning Stages

Advanced Vertical Stage, ZTxTy

ZTxTy Three-Axis Motion

Carrier.S100/200.Z

Carrier.S100/200.ZTxTy

  • Capacitive sensor closed-loop control with 1 nm resolution
  • 80 mm Large Clear Aperture
  • 5 kg load capacity
  • Travel range options: 100/200 um
  • Fully non-magnetic, UHV versions available

Details >>

  • Vertical motion with TxTy two-axis swing adjustment
  • Capacitive sensor closed-loop control with 1 nm / 0.05 μrad resolution
  • Repeatability better than 10 nm
  • Fully non-magnetic, UHV versions available

Details >>

Open-Aperture Nanopositioning Stages · Carrier.S Series

XY Plane Solution

Parallel Kinematic Design and Capacitive Closed-Loop Control Ensures the Orthogonality of XY Plane Motion,

with an Rz Rotational Version Available

Carrier.S · Open-Aperture Nanopositioning Stages

XY Stage

XY Two-Axis Motion

Carrier.S · Open-Aperture Nanopositioning Stages

Carrier.S · Open-Aperture Nanopositioning Stages

XYRz Three-Axis Motion

Carrier.S100/200.XY

Carrier.S100/200.XYRz

  • Capacitive sensor closed-loop control with 1 nm resolution
  • Repeatability better than 10 nm
  • Travel range options: 100/200 um
  • Fully non-magnetic, UHV versions available

Details >>

  • High-Speed XY Translation with Integrated Rz Rotation
  • Capacitive sensor closed-loop control with 1 nm / 0.3 μrad resolution
  • Travel range options: 100/200 um
  • Fully non-magnetic, UHV versions available

Details >>

Open-Aperture Nanopositioning Stages · Carrier.S Series

XYZ Solution

Parallel Kinematic Design and Capacitive Closed-Loop Control Ensures XYZ Motion Orthogonality；

Ultra-Thin Versions Also Available for Optical Microscopy

Carrier.S · Open-Aperture Nanopositioning Stages

XYZ Stage

XYZ Three-Axis Motion

Carrier.SL · Lightweight Open-Aperture Nanopositioning Stages

XYZ Stage

XYZ Three-Axis Motion

Carrier.S100/200/300.XYZ

Carrier.SL200.XY/XYZ

  • Capacitive sensor closed-loop control with 1 nm resolution
  • Repeatability better than 10 nm
  • Travel range options: 100/200/300 um
  • Fully non-magnetic, UHV versions available

Details >>

  • Capacitive sensor closed-loop control with 1 nm resolution
  • Repeatability better than 10 nm
  • Travel range options: 100/200/300 um
  • Fully non-magnetic, UHV versions available

Details >>

Open-Aperture Nanopositioning Stages · Carrier.S Series

XYZTxTyRz 6DOF Solution

The Ultimate Nanopositioning Solution: Fast, Precise, Fully Free

Carrier.S100/200/300.6D

  • Capacitive sensor closed-loop control with 1 nm / 0.1 μrad resolution
  • Repeatability better than 3 nm
  • Travel range options: 100/200/300 um
  • Fully non-magnetic, UHV versions available

Details >>